Overview

Lifter Bellows are designed with custom face seals for semiconductor processing equipment. In order to move the silicon wafers being produced, the lifter bellows and actuator assembly produce a leak tight mechanism to transport the wafer. BellowsTech edge welded bellows have low leak rates, custom designs and flexibility for motion.  BellowsTech’s goal is to ensure proper wafer placement and seating.  With in-house design expertise, our engineers will build a solution to match the speed and size requirements of the application.

Lifter bellows assemblies are available in a variety of materials including AM350, 304L and 316L stainless steel.  For applications requiring reduced weight, Titanium is also available.

While BellowsTech offers over eighty standard bellows diaphragms, custom diaphragms can be designed to customer specifications.  Contact the factory for more information.

Specifications – Lifter Bellows – PDF

Common Materials AM350, 347, &316L SS
Thickness 0.002″ and up every 0.001″
Standard Leak Rate <1×10-9 std CC He/sec
Size Ranges
Outside Diameter 0.358″ (9.0932mm) to 22.205″ (564mm)*
Inside Diameter 0.198″ (5.029mm) to 19.921″ (505.99mm)*
Shapes Round standard. Non-Round Available; Contact Factory.
Length Up to 96 inches (244 cm)

*For other dimensional requirements, contact the factory

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There are over 90 Standard Diaphragm sizes available.

View the entire die list here and quickly choose the best fitting bellows mechanical seal for your application