Lifter
Bellows
Overview
Lifter Bellows are designed with custom face seals for semiconductor processing equipment. In order to move the silicon wafers being produced, the lifter bellows and actuator assembly produce a leak tight mechanism to transport the wafer. BellowsTech edge welded bellows have low leak rates, custom designs and flexibility for motion. BellowsTech’s goal is to ensure proper wafer placement and seating. With in-house design expertise, our engineers will build a solution to match the speed and size requirements of the application.
Lifter bellows assemblies are available in a variety of materials including AM350, 304L and 316L stainless steel. For applications requiring reduced weight, Titanium is also available.
While BellowsTech offers over eighty standard bellows diaphragms, custom diaphragms can be designed to customer specifications. Contact the factory for more information.
Specifications – Lifter Bellows – PDF |
|
| Common Materials | AM350, 347, &316L SS |
| Thickness | 0.002″ and up every 0.001″ |
| Standard Leak Rate | <1×10-9 std CC He/sec |
| Size Ranges | |
| Outside Diameter | 0.358″ (9.0932mm) to 22.205″ (564mm)* |
| Inside Diameter | 0.198″ (5.029mm) to 19.921″ (505.99mm)* |
| Shapes | Round standard. Non-Round Available; Contact Factory. |
| Length | Up to 96 inches (244 cm) |
*For other dimensional requirements, contact the factory
